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精密切割(ge)(ge)加工(gong)是(shi)(shi)制(zhi)備(bei)半(ban)導(dao)體和光電(dian)(dian)(dian)晶(jing)(jing)體基(ji)片的(de)主要加工(gong)工(gong)藝(yi)之一，在微(wei)(wei)電(dian)(dian)(dian)子(zi)、光電(dian)(dian)(dian)子(zi)器件的(de)制(zhi)造過程中(zhong)占有(you)很高(gao)的(de)地(di)位。而隨著微(wei)(wei)電(dian)(dian)(dian)子(zi)和光電(dian)(dian)(dian)子(zi)技(ji)術飛速(su)發(fa)展(zhan)，對半(ban)導(dao)體和光電(dian)(dian)(dian)晶(jing)(jing)體的(de)切割(ge)(ge)加工(gong)提出更高(gao)要求(qiu)。高(gao)效率(lv)、低(di)(di)成本、高(gao)精度(du)、窄切縫、小翹(qiao)曲變形(xing)、低(di)(di)表面損傷、低(di)(di)碎片率(lv)、無環境污染等是(shi)(shi)目前半(ban)導(dao)體和光電(dian)(dian)(dian)晶(jing)(jing)體的(de)切割(ge)(ge)加工(gong)的(de)新趨勢。

現在(zai)，硬脆晶(jing)體材料切割(ge)(ge)方法有金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)圓(yuan)鋸(ju)(ju)切割(ge)(ge)、帶(dai)鋸(ju)(ju)切割(ge)(ge)、線(xian)鋸(ju)(ju)切割(ge)(ge)。金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)圓(yuan)鋸(ju)(ju)有分為(wei)金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)外圓(yuan)據(ju)和金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)內圓(yuan)鋸(ju)(ju)兩種(zhong)；帶(dai)鋸(ju)(ju)分為(wei)鋼(gang)帶(dai)據(ju)、金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)帶(dai)鋸(ju)(ju)、鋼(gang)片鋸(ju)(ju)三種(zhong)；線(xian)鋸(ju)(ju)分為(wei)鋼(gang)絲(si)鋸(ju)(ju)、金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)串珠(zhu)鋸(ju)(ju)、金(jin)(jin)剛(gang)石(shi)(shi)(shi)(shi)(shi)絲(si)鋸(ju)(ju)三種(zhong).

金剛石外圓鋸切割技術
金(jin)剛石(shi)外圓鋸(ju)切(qie)割(ge)技術是(shi)應用較早的切(qie)割(ge)方(fang)法，外園周上電鍍金(jin)剛石(shi)的圓鋸(ju)片(pian)直徑在.......